반도체 공정에 이용되는 지능형 천장 반송 시스템의 최적 중앙제어

Optimal Central Control of OHT(Overhead Hoist Transport) in Semiconductor Processing

There is an Overhead Hoist Transport(OHT) by the system for delivering the wafer in semiconductor processing. The transfer system consists of carrier, vehicle, rail and support. OHT Control and Management System(OHTCMS) has to take the feature such as the optimal control and integration with serval OHTs. In this paper, Efficiency of Shortest - Route Algorithms(ESRA) is proposed, which can be transported optimal route and be prevented collision using the Floyd-Warshall algorithms. The proposed algorithm is verified through consecutive simulation for a long time.

Abstract

1. 서론

2. 최적 중앙제어

3. 충돌 방지

4. 소프트웨어 상에서의 구현

5. 시뮬레이션 결과

6. 결론

참고문헌

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