펨토초 레이저 어블레이션을 이용한 알루미나 세라믹 기판의 미세 홀 제조

Microhole fabrication on alumina ceramic substrate using femtosecond laser ablation

  Microdrilling of alumna ceramic with good edge clarity and roundness using a femtosecond laser micromachining system is reported. The fabrication of microholes with sub-hundred micrometer in diameter often results in a poor quality hole due to the accumulation of sub-microparticles. To avoid the deterioration of hole quality with decreasing hole size, the condition of blowing air and laser beam interval for repeated ablation are controlled. Also, the results when Galvano scan mirror with telecentric lens is used for beam steering and when translation stages with a stationary objective lens is used for patterning are compared. Improvement of hole shape and drilling of small through holes are realized with process optimization.