Laser Direct Writing 방법을 이용한 광도파로 제작

Fabrication of waveguide using UV Ar-ion laser direct writing

  The laser direct writing method using a UV Argon-ion laser is studied for fabrication of waveguide. The laser direct writing system is constructed with a vision camera, a xy-stage, a motion controller and the delivery components of a laser beam. The UV Argon-ion laser has wavelength range of 333.6~363.8 ㎚. A photo-active UV curable polymer for a planar light-wave circuit(PLC) of single mode is used. This polymer is irradiated by Argon-ion laser and developed by a solvent after a post-baking. The optimum laser direct writing condition is obtained experimentally by changing various process parameters such as laser power, writing speed and focal length. The propagation and coupling loss of a optical waveguide was measured as 1㏈/㎝ and 0.6㏈/㎝, respectively. Also, the minimum width of waveguide of l0㎛(ZPLW­207) is obtained. Finally, the waveguides of line, bend and branch type are successfully fabricated.