펨토초 레이저를 이용한 미세 패터닝 기술

Periodic patterning using a femtosecond laser

  We report experimental results on the periodic patterning using a Ti:sapphire femtosecond laser (800 ㎚, 100 fs, 1㎑). Periodic structures with reproducible basic patterns are produced both on the surface and inside transparent materials. Period patterning for the application to display panel is widely investigated. Also, the submicron dot and line patterns are fabricated inside fused silica glass, which is important for the formation of diffraction grating in integrated optical circuit. Finally, we demonstrate the utility of the femtosecond laser application to optical memory by fabricating the three-dimensional dot patterns.