Al 표면상에 펨토초 레이저와 양극산화 공정을 통한 마이크로-나노 하이브리드 패턴 제작

Fabrication of micro-nano hybrid pattern on aluminum surface using femtosecond laser and AAO process

  Various laser surface modifications, such as laser cladding, laser surface alloying and laser heat-treatment, are widely used to alter the surface of a component to improve the ability and characteristic of materials. Especially, the femtosecond laser with ultra-fast pulse speed and low thermal damage can be modified effectively a metal surface into another material. In this study, using the femtosecond laser as a tool of surface modification of Al thin film, several miro patterns with an amorphous layer on the Al thin film were fabricated with respect to laser intensity and scanning speed. Sequently, micro-nano hybrid patterns were fabricated by using a simple AAO (Anodic Aluminum Oxidation) process. Finally, we verified the validity of micro-nano hybrid patterns through SEM and EDS.