DUV 레이저를 이용한 Pentacene 박막의 어블레이션

DUV Laser Ablation of Pentacene film on Glass Substrate

  In this study, the pentacene patterning is performed using Deep Ultra Violet (DUV) excimer laser and mask projection technique. The pentacene, organic material is used as an active layer of Organic Thin Film Transistor (OTFT) because of their high carrier mobility (＞1.5㎠/Vs) characteristic and OTFT has used as an operating device in the backplane of flexible display. Conventional fabrication of pentacene pattern is vacuum plating using mask. It has limitation for the fine pattern. However, excimer laser patterning can make finer pattern and minimize solvent damage for the plastic substrate by elimination of developing and stripping. This paper shows the feasibility of direct and fine patterning of organic layer with DUV laser.