피코초 레이저를 이용한 회절 격자 금형 개발

Practical application of picosecond laser micro-machining to the direct fabrication of a diffraction grating mold

  Picosecond (ps) laser micro-machining has emerged as an attractive method of fabricating high-precision microstructures, especially in metals. In this paper, a metallic mold for diffraction gratings is fabricated with a mode-locked 12 ps Nd:YVO₄ laser. Laser pulses with a wavelength of 355㎚ are irradiated on the surface of NOK 80, a mold material, to generate line patterns. In order to minimize the line width, laser power is set just above the ablation threshold of NOK 80. Results show that the spectrum from the fabricated mold is good enough for some industrial application