355㎚ UV 레이저 조사시 재료 표면의 국부적 열팽창에 의한 마이크로렌즈어레이 쾌속 제작

Rapid Fabrication of Microlens Array on the Material Surface by Local Thermal-expansion with 355㎚ UV Laser Irradiation

  Micro Lens Arry(MAL) is widely used in fields of IT industries such as projection display, optical power regulator, micro mass spectrometer and medical appliances. Recently MLA have been fabricated and developed by reflow method, micro etching, electroplating, micro machining and laser local heating. Laser local heating technology demonstrated the formation of micro-dots on the surface of densified glass by thermal relaxation. In this paper, we have proposed the new rapid manufacturing method of MLA on the surface of SU-8 photoresist. We have studied the 3D shape of micro lens obtained by UV laser irradiation .We have also investigated the optimal process conditions. At lower laser fluence, the interaction between SU-8 and laser has been verified experimentally. The cross section of micro lens has been measured Gaussian-like shape. This fabrication process provides a new method of rapid manufacturing of MLA.