학술저널
고정 마스크에 의한 레이저 미세패터닝 쾌속 제작
Rapid Manufacturing of Laser Micro-Patterning Using Fixed Masks
- 한국레이저가공학회
- 한국레이저가공학회지
- 한국레이저가공학회지 제9권 제1호
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2006.0317 - 23 (7 pages)
- 22
커버이미지 없음
The technologies of laser micromachining are changed toward more complex-micropatterning, from the micro circle-shaped hole drilling to the micro arbitrary-shaped hole drilling. In this paper, the fundamental experiments by using DPSS 3rd harmonic Nd:YVO₄ laser(A=355㎚) were carried out in order to obtain the feasibility of flexible micropatterning by various fixed masks. Fixed masks and Galvano scanners were investigatde to make micro patterns. From these experimental results, micropatterns on PEN film were rapidly manufactured in large area.
Abstract<BR>1. 서론<BR>2. 실험 방법<BR>3. 실험 결과<BR>4. 결론<BR>감사의 글<BR>참고문헌<BR>
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