학술저널
스캐너를 이용한 고속 펨토초 레이저 가공 기술
High-Speed Femtosecond Laser Micromachining with a Scanner
- 한국레이저가공학회
- 한국레이저가공학회지
- 한국레이저가공학회지 제9권 제2호
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2006.0911 - 15 (5 pages)
- 125
커버이미지 없음
We report experimental results on the high-speed micromachining using a femtosecond laser (800 ㎚ 130 fs, 1㎑) and galvanometer scanner system (Raylase, Germany). Periodic hole drilling of silicon and glass with the scan speed of 1-20 ㎜/s is demonstrated. Finally, we demonstrate the utility of the femtosecond laser application to ITO patterning by using a high-speed femtosecond laser scanner system.
Abstract<BR>1. Introduction<BR>2. Experiment and Results<BR>3. Conclusions<BR>References<BR>
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