하이브리드형 AFM/SCM을 이용한 레이저 미세 가공 표면 측정

Precision measurement of a laser micro-processing surface using a hybrid type of AFM/SCM

  Hybrid type microscope with a Scanning Confocal Microscope (SCM) and a shear-force Atomic Force Microscope (AFM) is suggested and preliminarily studied. A image of 120×120㎛² is obtained within 1 second by SCM because scan speed of a X-axis and Y-axis are 1㎑ and 1㎐, respectively. Shear-force AFM is able to correctly measure the bight and width of sample with a resolution 8nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. We have carried out the measurement of total image of a sample by SCM and an exact analysis of each image by shear-force AFM.