하이브리드형 AFM/SCM을 이용한 레이저 미세 가공 표면 측정
Precision measurement of a laser micro-processing surface using a hybrid type of AFM/SCM
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2006년도 추계학술발표대회 논문집
-
2006.11123 - 127 (5 pages)
- 49
Hybrid type microscope with a Scanning Confocal Microscope (SCM) and a shear-force Atomic Force Microscope (AFM) is suggested and preliminarily studied. A image of 120×120㎛² is obtained within 1 second by SCM because scan speed of a X-axis and Y-axis are 1㎑ and 1㎐, respectively. Shear-force AFM is able to correctly measure the bight and width of sample with a resolution 8nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. We have carried out the measurement of total image of a sample by SCM and an exact analysis of each image by shear-force AFM.
ABSTRACT<BR>1. 서론<BR>2. 실험 방법<BR>3. 결과 및 고찰<BR>4. 결론<BR>5. 참고 문헌<BR>
(0)
(0)