학술대회자료
이송축 특성을 고려한 미세가공용 오토포커싱 장치의 피드백 제어
Feedback control of auto-focus system for micro-fabrication considering the characteristics of feed axis
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2007년도 춘계학술발표대회 논문집
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2007.06102 - 107 (6 pages)
- 19
In this paper, auto-focusing system for laser micro-fabrication is presented and experimented. Confocal signal is considered as focusing error by using source modulation for auto-focusing control. And that signal is also used as error at the control of Z-axis moving auto-focusing system especially. So Z-axis characteristic represented as repeatability is captured using laser interferometer. Finally, auto-focusing experiment is done considering Z-axis feature and using off-line feedback control with the specimen of mirror.
ABSTRACT<BR>1. 서론<BR>2. 자동초점조절 장치<BR>3. Z축의 반복정밀도 및 미러 표면에의 AF 적용실험<BR>4. 결론<BR>참고 문헌<BR>
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