공초점 정렬을 이용한 자동초점보정 레이저 직접묘화 시스템

Auto-focusing laser direct writing system using confocal geometry

  We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.

ABSTRACT<BR>1. 서론<BR>2. 레이저 직접묘화 시스템<BR>3. 실험 및 결과<BR>4. 결론<BR>참고문헌<BR>

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