첨단 레이저가공용 고속 장행정 이송을 위한 보이스 코일 모터 기반의 구동기 설계

Design of Actuator based on Voice Coil Motor with High Speed and Long Stroke Movement for Advanced Laser Micro-Fabrication

  In this paper, actuator based on voice coil motor is designed and estimated to check the capability whether that system is in design specification or not. Design specification is moving range as 20×20㎟ along .XY-axis in plane and maximizes bandwidth for high speed. The type of voice coil motor is selected with regarding design specification and minimizes the size of actuator. Flux density of designed voice coil motor is simulated. And PI controller is designed to maximize bandwidth of actuator. Finally, characteristic of designed actuator is simulated and that result reveals the validity of presented design.