간격제어가 가능한 레이저유도 에칭기술을 이용한 금속채널의 제조

Manufacture of metallic channels by using laser-assisted etching technique with gap control

  A new laser-assisted etching technique with gap control between a fiber tip and a workpiece is introduced. The gap control system consisting of a laser diode and a position sensitive detector controls the gap to make uniform shape and size microchannels. By using the etching technique, microchannels with triangular cross-section are fabricated, and the shape and size of microchannels are analyzed to evaluate the gap control system. The gap control system correctly worked according to the analysis, and hence it is expected that the proposed etching technique can be applied to the fabrication of micro devices based on microchannels.