학술대회자료
극초단파 레이저를 이용한 금형재의 격자 패턴 가공
Grating patterning on the mold material using the femtosecond laser
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2008년도 추계학술발표대회 논문집
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2008.11194 - 197 (4 pages)
- 77
Femtosecond laser machining is appropriate method for micromachining because of short pulse duration and minimizing the heat diffusion. We fabricated hologram pattern on the mold material using the femtosecond laser ablation. We machined the mold with the various fluence ranging from 3J/㎠ to 3.7J/㎠. We were able to produce the gratings on the mold material with the pitches as small as 15.um.
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