레이저 유기 후면 습식 식각(LIWBE) 기법을 이용한 유리 미세 가공 공정의 실험적 해석

Experimental analysis of glass micromachining by LIWBE method

Glass materials have been used in various areas due to their outstanding properties such as thermal and chemical stability, inertness, and transparency over wide wavelength. However, those properties also make it difficult to micromachine. Laser-induced backside wet etching(LIBWE) is a good altercative for micro-fabrication of UV transparent materials. In this paper, glass micromachining by the LIBWE method is analyzed experimentally to understand the process of material removal by varying the liquid environment where the ablation occurs. Mechanical effects induced by ablation of absorbing toluene liquid are responsible for molten material removal and are affected by the environment such as the chamber pressure. Experiments are conducted to investigate the effect of confined chamber and change in glass thickness on the etch rate.