학술대회자료
유리소재를 이용한 레이저 선택 접합
Selective laser bonding using liquid glass
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2008년도 춘계학술발표대회 논문집
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2008.06185 - 188 (4 pages)
- 34

A selective laser micro bonding process using liquid glass (Methylsilsesquioxane) was developed and the results are analysed. The liquid glass can be solidified with Nd:YAG laser irradiation and it can be applied for joining two glass substrates. A bonding thickness of a few hundreds~a few micron can be achieved. The appropriate lase power density for this process is around 40~60 kW/㎠ and its bonding force is 1000~1200gf. This process can be applied for bonding micro devices such as micro bio-sensors or display products. Its advantages and limitations are presented and discussed.
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