레이저 에칭 가공이 마이크로 홈의 벽면 조도에 미치는 영향

Effect of sidewall roughness of the microgroove produced with laser etching process

A novel laser etching technique utilizing an optical fiber as the machining tool is introduced. Here, depending upon whether a pulsed or a continuous wave (CW) laser is employed as the irradiation source, it was found that the etch depth and surface morphology of the grooves varied significantly. It was then demonstrated that deep microgrooves with smooth sidewalls can be obtained using a hybrid pulse-and-CW scanning process. Subsequent thermal and chemical analyses of the microgrooves revealed that sidewall roughness is mainly attributed to surface melting.

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