학술대회자료
레이저 미세가공 신 공정 및 장비 개발을 위한 플랫폼 개발
A platform for developing a new process and/or a new machine of laser micro-machining
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2008년도 춘계학술발표대회 논문집
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2008.069 - 14 (6 pages)
- 63
Laser micro-machining processes have increasingly been adopted to various advanced industries where high-precision and selective machining of large-area, high-density and multi-material parts is strongly required. To effectively meet the requirements, the laser micro-machining process must be carefully monitored online. In order to facilitate the development of a laser micro-machining process and a system, we have fabricated a UV laser micro-machining platform that is equipped with optical modules for monitoring the process online.
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