학술대회자료
알루미나의 펨토초 레이저 가공특성 연구
Femtosecond laser micromaching in Alumina ceramic
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2008년도 추계학술발표대회 논문집
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2008.11121 - 124 (4 pages)
- 100
Alumina ceramic has beem micro-structured in air using a chirped-pulse-amplification Ti:sapphire laser. High quality of micro-machining of alumina with almost no melting layer and fine depostion layer of debrisis obtained. So we can fabricate micro-cuts which has small rougthness section with angle of 45~76˚ on groove wall. It was found that initial crystalline phase(α-Al₂O₃) is unaltered of subtrate and the debris produced consists of single crystal nanoparticle of α-Al₂O₃with diameters from 20nm to 10㎛.
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