평명 반사판을 이용한 레이저 충격파 세정 공정

Laser shock cleaning process using a plane reflector

It has been shown that the laser shock cleaning (LSC) method is effective to eliminate submicron-scale particulates from solid surfaces. In the LSC process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsuquently created shock wave followed by a high-speed flow stream detaches the particles. In this work, the amplification of shock wave pressure using a Shock wave reflector is introduced and demonstrated, numerically and experimentally. Shock wave reflector increases the shock wave pressure and can remove smaller particle compared with conventional LSC method. According to the numerical calculation, the shock wave pressure is amplified about double times by shock wave reflector. The experimental results conforms that the cleaning force and cleaning efficiency are increased by this method.