DPSS UV laser를 이용한 롤 금형 미세가공

Micromachining for Roll Mold Using DPSS UV Laser

This paper presents the method to fabricate a roll mold with microstructure using DPSS(diode pumped solid-states) UV laser. DPSS laser ablation makes it possible to micromachine by controlled energy density and pulse repetition rate of laser. But, In case of metal ablation, molten debris is caused by thermal damage. Hence, We suggest the process of the ablation of a photoresist(PR) coated on roll mold. And we design a roll coater for laminating the photoresist onto the curby surface of a copper roll mold. The microstructure on roll mold is fabricated by controlled laser pulse energy, pulse repetition rate, rotation speed and rotation number of roll. We compare and analyze the quality of microstructure by the wet etching process with the quality by the direct write process.