355nm UV 레이저를 이용한 마이크로 렌즈 어레이 제작 및 몰드 제작

Fabrication of Micro Lens Array and mold using by 355nm UV Laser Irradiation

Micro lens array (MLA) is widely used in information technology (IT) industry fields, for examples such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method, micro etching, electroplating, micromachining and laser local heating. Laser local thermal-expansion (LLTE) technology demonstrates the formation of microdots on the surface of several polymer substrate, in this paper. We have also investigated the new direct fabrication method of placing the MLA on the surface of nagative photoresist layer. We have obtained the 3D shape of the micro lens processed by UV laser irradiation and have experimentally verified the optimal process conditions. And we have finally fabricated MLA mold with nickel.