학술대회자료
펨토초 레이저에 의한 PDMS 가공 특성
Micromachined Properties of a PDMS by femtosecond laser
- 한국레이저가공학회
- 한국레이저가공학회 학술대회 논문집
- 2008년도 춘계학술발표대회 논문집
-
2008.06134 - 139 (6 pages)
- 128
The surface treatment of PDMS (polydimethylsiloxane) by femtosecond laser can help the accurate and fine fabrication of microstructure. Very small beam power is enough to make dots or lines on th PDMS' surface. We put femto second laser single pulse, and multi pulses on PDMS with different power and/or repetition rates to make dots, lines and rectangular or square type surface treatments. Pulse patterning is stable and almost least unwanted surface damage is shown.
(0)
(0)