CO₂ 레이저를 이용한 시료 표면의 국부 폴리싱

The local polishing of material surface using the CO₂ laser

In this paper, we study experimentally the local polishing of SiO₂ surface using the CO₂ laser. For laser local polishing, we polished to remove the grooves or to be reformed the surface of grooves after forming the grooves on the material surface. We measured the reflectance, transmittance, and beam profile in order to measure the roughness of polished surface. The Atom Force Microscope (AFM) is used to measure roughness of local polishing surface. We can predict that the laser polishing contribute to the removal of generated debris and surface roughness on the micro processing.