DPSS UV laser와 습식 식각을 이용한 금형강 미세 가공

Micromachining for plastic mold steel using DPSS UV laser and wet etching

This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of FeCl3, HNO3 in water as etchants. This method makes it possible to fabricate metallic roller mold because the microstructures are directly fabricated on the metal surface. In the range of operating conditions studied, 17 μJ laser pulse energy and 50 ms laser exposure time, an etchant containing 40wt% FeCl3, 5wt% HNO3 and etch time for 45 s gave the 10 ㎛ of micro dot pattern on plastic mold steel.