학술저널
자외선 레이저를 이용한 폴리머 박막 가공의 수치해석
Numerical Analysis of UV Laser Patterning of polymeric Thin-Film
- 한국레이저가공학회
- 한국레이저가공학회지
- 한국레이저가공학회지 제12권 제4호
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2009.121 - 5 (5 pages)
- 163
Conventional patterning based on wet-process for multi-layered film is a relatively complex and costly process though it is a necessary step for fabrication of TFT-LCD module. Recently, a direct pattering by laser has been studied because it is low cost and simple process compared to the wet process. In this work, the selective removal process of multi-layered film (polyimide/indium tin oxide/glass) is studied by modeling the thermal and mechanical behavior for multi-layered structure. Especially, the effects of thickness of polyimide layer are examined.
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