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Fabrication and improvement of diffraction grating with femtosecond and CO₂laser

We fabricated the diffraction grating on the surface of fused silica glass using a femtosecond laser. The grooves of diffraction grating has a lot of micro crack and debris result in reduced diffraction efficiency. So, we polished the diffraction grating with CO₂laser beam. With different scan number of CO₂laser beam, we observed the image of diffraction grating and measured the diffraction efficiency.

Abstract

1. 서 론

2. 실험 및 결과

3. 결 론

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