Compuer에 의한 Gas Sensor의 特性解析

Gas sensor, oxide metal semiconductor SnO₂, ZnO have been fabricated to thin : film by chemical evaporation method and vacuum evaporation equipment. the sensor sensitivities upon gas (O₂, H₂, Acetone, propane, etc) concentration were inquired and analyzed through computor. the experiment formulas of sensitivity curves are able to request by this computor analysis and analyze all the more the curves. On the other hade, the sensors which appended additions to the original oxide metal semi conductors can make curve sensitivity more better. Then, the fundamental study course for sensor material improvement is demanded still more.