마이크로 펌프의 PZT 엑튜레이터 거동 해석

The behavior analysis o i PZ1 actuators lo r m icropum p

Recently, there has been an increased interest in microfludic system employing MEMS technologies. The core component of this system is a piezoelectric valvless micropump that can convert the reciprocating movement of a membrane activated by a PZT actuator. Modeling of the PZT actuator was performed using CoventorWare. to analyze a behavior membrane, several important parameters were included. Membrane centeral displacement is increased with increasing PZT area ratio, but is decreased with increasing PZT thickness ratio. we found that the membrane displacement decreases when increasing the bonding layer thickness and increasing the PZT/membrane thickness ratio.