학술저널
반도체 제조장비 및 핵심부품 조사연구
A survey about the semiconauctor equmments & core parts
- 호서대학교 공업기술연구소
- 공업기술연구 논문집
- 제19권 제1호
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2000.0633 - 45 (13 pages)
- 32
This paper describes the state of the art about main equipments for semiconductor manufacturing. Front-end equipments such as stepper, CVD, etcher, ion implantor, RTP, CMP and back-end equipments including wire bonder, Mold/Trim/Form, tester are chosen for this study. Technology trend, parts classification and major manufacture’s DB are surveyed. It could be used to making a strategy for the development of semiconductor equipment.
1 . 서 론
2 . 노광장비
3 . 식각 장비
3. CMP
4 ■결론
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