박막제조공정이 Ti-Al-N 박막의 물리적 특성에 미치는 영향

Effects of Process Conditions on the Physical Properties of Ti-Al-N Thin Film

It is well known that aluminium alloy is a very useful material due to light weight and high strength compared to any other metallic materials. However, low hardness limits its applications. In the past two decades, surface modification technology has been widely developed to enhance surface properties and extend the service lifetime of materials. With the thin film coating, such as TiN thin film, they improved tribological properties of wear resistance and durability of cutting tools, drills or end mills using their high hardness. The incorporation of aluminum in the cubic fcc TiN structure leads to enhanced thermal stability of the coating. At high temperatures, aluminum forms a stable oxide of Al2O3 upon exposure to oxidizing conditions, thus protecting the underlying Ti–Al–N layers. In thin sport, We have successfully developed TiAlN thin film as hard coating on Al 2024 alloy using magnetron sputtering process to overcome the low hardness of Al alloy through the surface modification technology. Ti-6Al-4V alloy was adopted as target material which has affinity of Al component to the Al 2024 substrate for the TiAlN coatings. Coating experiments were carried out with different process conditions of nitrogen gas pressure to understand the influence of nitrogen in TiAlV coating on the tribological properties.