일렉트로마이그레이션이 이퓨즈에 미치는 영향과 개선에 관한 연구

A Study on Affects & Improvement in the eFUSE by the Electromigration

In this study, Electromigration synopsis and developing, the electric heater which applies eFUSE system in case the breakdown will occur alternative solution experiment and Simulation leads from the present paper and under escape boil the Solution. Grasp analyzed Electromigration justice and a developing with precedence, analysis of eFUSE system composition element and function led and trouble analysis. Specially investigates Diode and MOSFETs quality and the function which are eFUSE system composition elements, data and in base with eFUSE system substitutions Diode (1N5814) which are damaged substitutes and the electric heater operates and condition before breakdown occurring and identically, namely very confirmation verified the fact that becomes the operation normally and predicted. Consequently, broken wire of eFUSE system damage and copper wiring, being an actual condition in compliance with Electromigration experiment leads and confirms, feed Diode and MOSFETs quality and function and principle of operation, that plan and management of manufacturing process there is a necessity which prudently will do, becomes.