레이저 간섭계를 이용한 측정발의 길이에 따른 정반의 평면도에 관한 연구

A Study of Flatness of Surface Plate Under Measurement Foot Distance Using Laser Interferometer

A las er inte rferometer is a system to measure very accur ate motion by using optical interference, and it i s used not only f or meas urement of er ror of length measurement of standard, machine tool, and measuring equipm ent but also for extraction o f location by being in cluded in a precision tool as a sta ndard. A flatne ss indi cates the size of difference from the set s tandard flat surface on the measured, and the st andard flat surface indica tes the geomet rical flat surface including p oints far from the measured flat surface. In thi s study, the length of mea surement foot using a laser interferometer was measured to determine the difference of f latness under the numb er of me asuring points.