학술저널
스퍼터 전력에 따른 ITO/PET 전도막의 특성에 관한 연구
A Study on the Properties due to Sputter Power of ITO Thin Films Prepared on the PET Substrate
- 한국산업기술융합학회(구. 산업기술교육훈련학회)
- 산업기술연구논문지
- 산업기술교육훈련논문지 제16권 4호
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2011.129 - 14 (6 pages)
- 12
ITO films on PET substrate were prepared by DC magnetron sputtering method using powdery target with different deposition conditions. In addition, the electrical and optical properties were investigated. As the sputtering power was higher, the resistivity of ITO films increased. The optical transmittance deteriorated with increasing sputtering power and thickness. From this results, we could deposited ITO films with 8×10-3 Ω-cm of resistivity and 80% of transmittance at optimal conditions.
Ⅰ. 서 론
Ⅱ. 실험방법
Ⅲ. 실험결과 및 고찰
Ⅳ. 결 론
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