AD(Aerosol Deposition)방법을 이용한 BaTiO3-AlBaTiO3-Zn 복합막 비유전 성질

Dielectrics Properties of BaTiO3-AlBaTiO3-Zn Composite Film by AD(Aerosol Deposition) Method

For the purpose of application Inner high capable capacitors were made to BaTiO3-AlBaTiO3-Zn composite film by AD(aerosol deposition) at room temperature. The result of dielectrics proved 1028.8, 47 vol.% at additive Al-composite film and 367, 11.8 vol.% at additive Zn-composite film in 1 kHz frequency band. The results were proved that Dielectrics constant decreased by frequency values increase because of Maxwell-Wagner-Sillars (MWS) polarization. If conductive of metals were high, dielectrics characteristics of composite film were improved. but composite film leakage current proved high value. The improvement of leakage current must be decreased by more research experiment.