원자현미경의 이미지 구현 시 직각 경계 부위의 이미지 형상 왜곡 방지를 위한 실험적 연구

Experimental Research for Preventing Distortion of Materializing Right Angle Boundary of Atom Force Microscope Image

Atom Force Microscope is a device that can measure few nanometers of resolution. AFM which is suitable for semiconductor requires the delicate operation to measure fine size and pattern form. These three Scan Rate, Set point, Z Servo gain is the important part. If the value is set up wrong, distorted image come out. These three parameters don t effect as a single value. It correlates and gives scanned image result. This study demonstrates after measuring three parameters separately and tracing one parameter s standard value with other two fixed suitable parameter. Distorted image through the measurement cannot be decided with the result. So it has to be measured with the standard parameters. This essay shows the best Scan rate, Set point, Z Servo gain parameter according to the cantilever specific condition and the roughness of a sample.