다중벽 탄소나노튜브 습도센서의 제작과 응답특성

Fabrication and Response Characteristics of Multi-walled Carbon Nanotube Film Humidity Sensor

This paper represents a highly porous MWCNT film electrode with interconnected open pores and demonstrated the possibility of using an MWCNT network film as the top electrode for polyimide capacitive humidity sensors. Polyimide humidity sensors with MWCNT electrodes exhibited about 6 times faster response than equivalent Cr electrode sensors. This result may be due to their percolated pore structures, which make water molecules accessible to all polyimide surfaces. The much faster response times of MWCNT electrode sensors is attributed to the percolated pore network, which allows more water molecules to be accessible to polyimide surfaces.