다결정 실리콘 카바이드의 열전 특성 및 응용에 관한 연구

A Study of Thermoelectric Characteristics of Poly-SiC and its Applications

We have fabricated n-poly-SiC/p-poly-Si thermopiles on Si substrates and investigated their thermoelectric characteristics. Calorimetric gas flow sensors usingn-poly-SiC/p-poly-Si thermopiles were realized and characterized. The highest Seebeck coefficient of n-poly-SiC/p-poly-Si was 2180μV/K, obtained using a heater power of 148mW. The fabricated flow sensors exhibit operational capacity up to 1000sccm and sensitivity of -14.5μV/sccm for a heater current of 3mA in the 700sccm range. The response time of the sensors(40ms) was faster than the mass flow controller’s signal. The presented current-voltage characteristics of the thermopiles reveal good ohmic contact. Our results indicate that the proposed structure using SiC thermopiles is not only a good candidate for a new micro flow sensor, but also has potential for a variety of applications in the field of microelectromechanicalsystems(MEMS) sensors.