학술저널
On The Sputtering of Physical Vapor Deposition
- 한국세라믹학회
- The Korean Journal of Ceramics
- Vol.5 No.1
-
1990.0713 - 19 (7 pages)
- 0
INTRODUCTION
BASES
AN EXAMPLE OF SPUTTERING APPARATUS
ANALYSIS OF FILM MATERIALS
REFERENCES
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