다중 I/O 반도체 장비 제어를 위한 고속 PCI 시스템

High-speed PCI System for Multi-I/O Semiconductor Equipment Control

This study describes a peripheral component interconnect (PCI) system for multi input and output with servo motor control that is cost efficient and offers high-speed processing, accuracy, and efficiency in semiconductor control and test systems. Most existing semiconductor systems use computer-based systems for user-friendly operation but have complicated architectures. For this reason, fast data acquisition and accurate motion control are required. The proposed system provides a 33-MHz clock signal and uses the same multiplex 32/64-bit signal lines for address and can handle extensive data. It also uses a bus master instead of direct memory access to prevent the CPU from being overloaded. In addition, the proposed system uses arbitration signals to control tight use of the bus. The system has the ability to transfer data by burst access mode. Finally, we also consider effective system design methods using PCI architecture.