시뮬레이션 기반의 잉곳 제조 공정 스케쥴링

Simulation based scheduling in Ingot Manufacturing Process

Presented in this paper is a release policy to achieve the on-time delivery for an ingot manufacturing process including ingot growing. An ingot is the first manufactured material of wafers. In ingot fabrication;the processing steps takes as long as 2 days as compared to 10 hours for processing steps in wafer FAB. A Release policy is critical to achieve the on-time delivery;because ingot manufacturing process contains less steps and has long processing times for each step. We developed a simulation model;and conducted experimentations with MOZART. The experimentation results show that the proposed release policy can achieve the on-time delivery in an ingot manufacturing process including ingot growing.