EDS 공정에서 Redundancy Analysis 시뮬레이션

Redundancy Analysis Simulation for EDS Process

It takes 2 or 3 months to manufacture memory device. Defect has to exist owing to hundreds of processes. If there are too many defects, the memory has to be rejected. But if there are a few defects, it will be more efficient and cost reducing for the company to use it by repairing. Therefore, laser-repair process is needed for such a reason and redundancy analysis is needed to establish correct target of laser-repair process. The equipment development company had provided the redundancy analysis and each development company had developed and provided separately. So, to analyze the similar type of defects, redundancy analysis time can be very different by the manufacture. The purpose of this research is to strengthen the competitive price and to apply correlation concept in business for reducing the redundancy analysis time to repair the defects