Hydride-dehydride process for efficient recycling of tantalum (Ta) is used for manufacturer of Ta powder. In case of metal powder, Impurities as like nitride, oxygen, hydrogen is decreased of physical properties. For manufacture of Ta powder, control of theses impurities is important. In this study, to decreased of impurities on Ta powder using HDH process optimize dehydride condition. Dehydration behavior of Ta is depended on temperature, time, and atmosphere. Phase transition of Ta hydride is analyzed by X-ray diffraction (XRD). Concentration of hydrogen is decreased with temperature increased. At high temperature, concentration of hydrogen in Ta is similar according to time increased. Size and morphology of powder is not observed after dehydride. Ta powder, which is less than 20 um, concentration of hydrogen under 800 ppm is obtain.
1. 서론
2. 실험 방법
3. 결과 및 고찰
4. 결론