커버이미지 없음
학술대회자료
MOCVD Deposition of AlN Thin Film for Packaging Materials
Sintering Characteristics of Dielectric Material for MCM-C & Electrical Characteristics of Buried Inductor as a function of Dielectric constant
- 한국마이크로전자및패키징학회
- 한국마이크로전자및패키징학회 학술대회자료집
- 1999년도 추계 기술심포지움 논문집
- 1999.11
- 59 - 63 (5 pages)