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학술대회자료
Nanotribological Characterization of Fluorocarbon Thin Film by Plasma Enhanced CVD
A Wafer Level CSP Technology, Wafer Process Packaging-WPP
- 한국마이크로전자및패키징학회
- 한국마이크로전자및패키징학회 학술대회자료집
- 2000년도 2nd Korea-Japan Advanceed Semiconductor Packaging Technology Seminar
- 2000.10
- 177 - 193 (17 pages)