학술저널
전기적 프로그램이 가능한 퓨즈 - 응용, 프로그램 및 신뢰성
Electrically Programmable Fuse - Application, Program and Reliability
- 한국마이크로전자및패키징학회
- 마이크로전자 및 패키징학회지
- 제19권 제3호
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2012.0921 - 30 (10 pages)
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DOI : 10.6117/kmeps.2012.19.3.021
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Technology trend and application of laser fuse, anti-fuse, and eFUSE as well as the structure, programming mechanism, and reliability of eFUSE have been reviewed. In order to ensure eFUSE reliability in the field, a sensing circuit trip point consistent with the fuse resistance distribution, process variation, and device degradation in the circuit such as hot carrier or NBTI, as well as fuse resistance reliability must be considered to optimize and define a reliable fuse programming window.
1. 서론
2. 이퓨즈 구조 및 프로그램
3. 신뢰성
4. 맺음말
감사의 글
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