The Fabrication of Low Temperature Firing Substrate of Li₂O-MgO-MgF₂-SiO₂-B₂O₃ system
The Fabrication of Low Temperature Firing Substrate of Li₂O-MgO-MgF₂-SiO₂-B₂O₃ system
- 한국마이크로전자및패키징학회
- 마이크로전자 및 패키징학회지
- 제6권 제4호
- : KCI등재후보
- 1999.12
- 35 - 39 (5 pages)
The Li₂O-MgO-MgF₂-SiO₂glasses with addition of B₂O₃ were investigated in order to make glass-ceramics for low temperature firing substrate. Glasses were made by melting at 1450℃ in the electronic furnace and crystallized at 750℃. The crystal phases were polycrystalline of lithium boron fluorphlogopite and lithium fluorhectorite. The crystal shape was chanced to granule type from needle type with increasing B₂O₃ content. Average particle size of the glass-ceramics after water swelling was 3.77μm. The optimum sintering temperature and sintering shrinkage of the substrate were 900℃ and 13.4%, respectively.
1. Introduction
2. Experimental Procedures
3. Results and Discussion
4. Conclusion
References