학술저널
Interfacial Electrical/Dielectric Characterization in Low Temperature Polycrystalline Si
Interfacial Electrical/Dielectric Characterization in Low Temperature Polycrystalline Si
- 한국마이크로전자및패키징학회
- 마이크로전자 및 패키징학회지
- 제12권 제1호
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2005.0377 - 85 (9 pages)
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1. Introduction
2. Experimental
3. Results and Discussion
4. Conclusions
Acknowledgements
References
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